Mack, Chris A.
Fundamental principles of optical lithography the science of microfabrication / [electronic resource] : Chris Mack. - Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007. - xvii, 515 p. : ill.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
GBA791483 bnb
Uk
Integrated circuits--Design and construction.
Microlithography--Industrial applications.
Electronic books.
TK7874 / .M196 2007eb
621.3815/31
Fundamental principles of optical lithography the science of microfabrication / [electronic resource] : Chris Mack. - Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007. - xvii, 515 p. : ill.
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
GBA791483 bnb
Uk
Integrated circuits--Design and construction.
Microlithography--Industrial applications.
Electronic books.
TK7874 / .M196 2007eb
621.3815/31