Rongo Univesity Library catalog › Details for: Reliability of MEMS

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Reliability of MEMS

Additional authors: Tabata, Osamu. | Tsuchiya, Toshiyuki. | ebrary, Inc.

Series: Advanced micro & nanosystems Published by : Wiley-VCH, (Weinheim :) Physical details: xx, 303 p. : ill.

Subject(s): Microelectromechanical systems -- Reliability. | Electronic books.

Year: 2013

Online resources:

http://site.ebrary.com/lib/rucke/Doc?id=10682369
- An electronic book accessible through the World Wide Web; click to view

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First edition 2007.

Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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