Rongo Univesity Library catalog › Details for: Enabling technologies for MEMS and nanodevices

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Enabling technologies for MEMS and nanodevices

Additional authors: Baltes, Henry. | ebrary, Inc.

Published by : Wiley, (Weinheim [Germany] :) Physical details: xii, 427 p. : ill.

Subject(s): Microelectronics. | Nanotechnology. | Microelectromechanical systems. | Electronic books.

Year: 2013

Online resources:

http://site.ebrary.com/lib/rucke/Doc?id=10683273
- An electronic book accessible through the World Wide Web; click to view

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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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