Micro cutting

Additional authors: Cheng, K. -- (Kai) | Huo, Dehong. | ebrary, Inc.
Series: Wiley Microsystem and nanotechnology series (ME20) Published by : John Wiley & Sons Inc., (Chichester, West Sussex, United Kingdom ; | New York :) Physical details: xvii, 348 p. : col. ill. Year: 2013
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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