Chemistry in microelectronics
Series: Electronics engineering series Published by : ISTE, (London :) Physical details: xii, 372 p. : ill. Year: 2013Online resources:
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http://site.ebrary.com/lib/rucke/Doc?id=10671571
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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