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Low-k nanoporous interdielectrics

by Ree, Moonhor.

Additional authors: Yoon, Jinhwan. | Heo, Kyuyoung. | ebrary, Inc.

Series: Nanotechnology science and technology Published by : Nova Science Publishers, (Hauppauge, N.Y. :) Physical details: 67 p. : ill.

Subject(s): Dielectric films. | Microelectronics -- Materials. | Porous materials. | Interconnects (Integrated circuit technology) | Electronic books.

Year: 2010

Online resources:

http://site.ebrary.com/lib/rucke/Doc?id=10675006
- An electronic book accessible through the World Wide Web; click to view

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Includes bibliographical references (p. [51]-61) and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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