Plasma processing of materials
Additional authors:
ebrary, Inc.
Published by :
National Academy Press,
(Washington, D.C. :)
Physical details: xii, 75 p. : ill.
Subject(s):
Plasma engineering.
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Microelectronics
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Materials
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Effect of radiation on.
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Surfaces (Technology)
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Electronic books.
Year: 1991
Online resources:
-
http://site.ebrary.com/lib/rucke/Doc?id=10055392
- An electronic book accessible through the World Wide Web; click to view
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Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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