Rongo Univesity Library catalog › Details for: Microsystem design

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Microsystem design

by Senturia, Stephen D.,

Additional authors: ebrary, Inc.

Published by : Kluwer Academic, (Boston :) Physical details: xxvi, 716 p. : ill.

Subject(s): Microelectromechanical systems -- Design and construction. | System design. | Microelectronics. | Electronic books.

Year: 2002

Online resources:

http://site.ebrary.com/lib/rucke/Doc?id=10053330
- An electronic book accessible through the World Wide Web; click to view

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Includes bibliographical references (p. [665]-676) and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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