Database needs for modeling and simulation of plasma processing
Additional authors:
ebrary, Inc.
Series:
The compass series
Published by :
National Academy Press,
(Washington, D.C. :)
Physical details: 64 p.
Subject(s):
Semiconductors
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Design and construction
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Congresses.
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Plasma engineering
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Databases
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Congresses.
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Plasma engineering
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Computer simulation
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Congresses.
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Electronic books.
Year: 1996
Online resources:
-
http://site.ebrary.com/lib/rucke/Doc?id=10056959
- An electronic book accessible through the World Wide Web; click to view
No physical items for this record
Includes bibliographical references.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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