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Lithography

Additional authors: Landis, Stefan. | ebrary, Inc.
Published by : ISTE ; | Wiley, (London : | Hoboken, N.J. :) Physical details: xxv, 377 p. : ill. (some col.)
Subject(s): Microlithography. | Electronic books.
Year: 2011
Online resources:
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Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.

Includes bibliographical references and index.

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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