Beam technologies for integrated processing
Additional authors:
ebrary, Inc.
Published by :
National Academy Press,
(Washington, D.C. :)
Physical details: xii, 89 p. : ill.
Subject(s):
Microelectronics industry.
|
Molecular beams
--
Industrial applications.
|
Microelectronics
--
Materials.
|
Plasma-enhanced chemical vapor deposition
--
Industrial applications.
|
Electronic books.
Year: 1992
Online resources:
-
http://site.ebrary.com/lib/rucke/Doc?id=10055022
- An electronic book accessible through the World Wide Web; click to view
No physical items for this record
"NMAB-461."
Includes bibliographical references.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
There are no comments on this title.