Digital holography for MEMS and microsystem metrology
Series: The Wiley microsystem and nanotechnology series Published by : Wiley, (Chichester, West Sussex, U.K. ; | Hoboken, N.J. :) Physical details: xxii, 205 p. : ill., port.
Subject(s):
Microelectromechanical systems
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Measurement.
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Microelectronics
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Measurement.
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Holographic testing.
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Image processing
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Digital techniques.
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Electronic books.
Year: 2011
Online resources:
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http://site.ebrary.com/lib/rucke/Doc?id=10484809
- An electronic book accessible through the World Wide Web; click to view
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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