Low energy ion assisted film growth

by Gonz�alez-Elipe, A. R. Published by : Imperial College Press ; | Distributed by World Scientific, (London : | Singapore ; | River Edge, NJ :) Physical details: xiv, 283 p. : ill. Year: 2003
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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