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Nanoimprint technology

Additional authors: Taniguchi, Jun. | ebrary, Inc.
Series: Microsystem and Nanotechnology Series Edition statement:1st ed. Published by : Wiley, (Chichester, West Sussex, U.K. :) Physical details: 1 online resource (xiv, 221 p.) : ill.
Subject(s): Nanoimprint lithography. | Nanolithography -- Materials. | Plastics -- Molding. | Polymers -- Thermal properties. | Thermoplastics. | Microfluidics. | Transfer-printing. | Electronic books.
Year: 2013
Online resources:
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Includes bibliographical references at the end of each chapters and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

Description based on online resource; title from title page (ebrary, viewed June 21, 2013).

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