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Plasma processing and processing science

Additional authors: Chen, Francis F., -- 1929- | National Research Council (U.S.). -- Panel on Plasma Processing. | National Research Council (U.S.). -- Naval Studies Board. | National Research Council (U.S.). -- Commission on Physical Sciences, Mathematics, and Applications. | ebrary, Inc.
Series: NRL strategic series Published by : National Academy Press, (Washington, D.C. :) Physical details: x, 35 p.
Subject(s): Plasma engineering. | Semiconductors -- Etching. | Plasma etching. | Electronic books.
Year: 1995
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Committee chair: Francis F. Chen.

This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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