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Semiconductor strain metrology

by Wong, Terence K. S.
Additional authors: ebrary, Inc.
Published by : Bentham Science, ([Saif Zone, Sharjah, U.A.E] ; | Oak Park, IL :) Physical details: 136 p. : ill.
Subject(s): Semiconductors -- Design and construction -- Materials. | Compound semiconductors -- Design and construction -- Materials. | Silicon-on-insulator technology. | Electronic books.
Year: 2012
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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