01265nam a2200313Ia 4500001001200000003000800012006001900020007001500039008004100054020001500095020001800110020001800128020001800146040002100164035002100185050002400206100001800230245017800248260004600426300002400472504005100496533015200547650003600699650002200735655002900757700002200786710001700808856012600825ebr10201291CaPaEBRm        u        cr cn|||||||||061018s2006    enka    sb    001 0 eng d  z1860944930  z9781860944932  z9781860949203  z9781601192691  aCaPaEBRcCaPaEBR  a(OCoLC)56789902214aTK7875b.G38 2006eb1 aGaura, Elena.10aSmart mems and sensor systemsh[electronic resource] /cElena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro.  aLondon :bImperial College Press,cc2006.  axii, 539 p. :bill.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectromechanical systems. 0aSmart structures. 7aElectronic books.2local1 aNewman, Robert M.2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10201291zAn electronic book accessible through the World Wide Web; click to view