@book{146345,
	author = {Ramm, Peter. and ebrary, Inc.},
	title = {Handbook of wafer bonding},
	publisher = {Wiley-VCH,},
	year = {2012.},
	address = {Weinheim, Germany :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10529302}
}