@book{163532,
	author = {Tiec, Yannick Le. and ebrary, Inc.},
	title = {Chemistry in microelectronics},
	publisher = {ISTE,},
	year = {2013.},
	series = {Electronics engineering series},
	address = {London :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10671571}
}