TY  - BOOK
AU  - Tiec,Yannick Le
ED  - ebrary, Inc.
TI  - Chemistry in microelectronics
T2  - Electronics engineering series
AV  - TK7874 .C44 2013eb
PY  - 2013///
CY  - London
PB  - ISTE
KW  - Microelectronics
KW  - Electronics
KW  - Materials
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10671571
ER  -