01605nam a2200325 a 4500001001200000003000800012006001900020007001500039008004100054010001700095020001500112040002100127035002000148050002400168082001600192110013500208245029500343260005500638300002300693500001600716504004100732533015200773650003100925650004600956650003301002650007201035655002901107710001701136856012601153ebr10055022CaPaEBRm        u        cr cn|||||||||920422s1992    dcua    sb    000 0 eng    z   92060205   z0309046351  aCaPaEBRcCaPaEBR  a(OCoLC)4496511514aTK7836b.N37 1992eb04a621.3812202 aNational Research Council (U.S.).bCommittee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.10aBeam technologies for integrated processingh[electronic resource] :breport of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.  aWashington, D.C. :bNational Academy Press,c1992.  axii, 89 p. :bill.  a"NMAB-461."  aIncludes bibliographical references.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectronics industry. 0aMolecular beamsxIndustrial applications. 0aMicroelectronicsxMaterials. 0aPlasma-enhanced chemical vapor depositionxIndustrial applications. 7aElectronic books.2local2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10055022zAn electronic book accessible through the World Wide Web; click to view