TY  - BOOK
ED  - National Research Council (U.S.).
ED  - ebrary, Inc.
TI  - Beam technologies for integrated processing: report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
AV  - TK7836 .N37 1992eb
U1  - 621.381 20
PY  - 1992///
CY  - Washington, D.C.
PB  - National Academy Press
KW  - Microelectronics industry
KW  - Molecular beams
KW  - Industrial applications
KW  - Microelectronics
KW  - Materials
KW  - Plasma-enhanced chemical vapor deposition
KW  - Electronic books
KW  - local
N1  - "NMAB-461."; Includes bibliographical references; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10055022
ER  -