TY  - BOOK
AU  - Asundi,Anand
ED  - ebrary, Inc.
TI  - Digital holography for MEMS and microsystem metrology
T2  - The Wiley microsystem and nanotechnology series
AV  - TK7875 .D54 2011eb
U1  - 621.381 22
PY  - 2011///
CY  - Chichester, West Sussex, U.K., Hoboken, N.J.
PB  - Wiley
KW  - Microelectromechanical systems
KW  - Measurement
KW  - Microelectronics
KW  - Holographic testing
KW  - Image processing
KW  - Digital techniques
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10484809
ER  -