TY  - BOOK
AU  - Baklanov,Mikhail
AU  - Ho,P.S.
AU  - Zschech,Ehrenfried
ED  - ebrary, Inc.
TI  - Advanced interconnects for ULSI technology
AV  - TK7874.53 .A39 2012eb
U1  - 621.39/5 23
PY  - 2012///
CY  - Chichester, West Susex
PB  - Wiley
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Interconnects (Integrated circuit technology)
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10538596
ER  -