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  <titleInfo>
    <title>Ion implantation and activation</title>
    <partNumber>Volume 2</partNumber>
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    <namePart>Suzuki, Kunihiro.</namePart>
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    <dateIssued encoding="marc">2013</dateIssued>
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  <physicalDescription>
    <extent>1 online resource (171 pages) : illustrations</extent>
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  <note type="statement of responsibility">Kunihiro Suzuki.</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Ion implantation</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Ion accelerators</topic>
  </subject>
  <classification authority="lcc">QC702.7.I55 S89 2013eb</classification>
  <identifier type="isbn">9781608057900 (e-book)</identifier>
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