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Results of search for 'au:Mack, Chris A.'
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Mack, Chris A.
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Integrated circuits
Microlithography
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1.
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Fundamental principles of optical lithography
the science of microfabrication /
by
Mack, Chris A.
Publication:
Chichester, West Sussex, England ; | Hoboken, NJ, USA : Wiley, 2007 . xvii, 515 p. :
Date:
2007
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2.
No cover image available
Fundamental principles of optical lithography
the science of microfabrication /
by
Mack, Chris A.
Publication:
Chichester, West Sussex, England ; | Hoboken, NJ, USA : Wiley, 2007 . xvii, 515 p. :
Date:
2007
Availability:
No items available:
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