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An introduction to microelectromechanical systems engineering by Maluf, Nadim. Publication: Boston : Artech House, 2004 . xx, 282 p. : Date: 2004 Availability: No items available:

2.
An introduction to microelectromechanical systems engineering by Maluf, Nadim. Publication: Boston : Artech House, 2004 . xx, 282 p. : Date: 2004 Availability: No items available:

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