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FBAR, MEMS and NEMS resonator design and applications by Campanella, Humberto. Publication: Boston : Artech House, 2010 . xv, 345 p. : , Includes index. Date: 2010 Availability: No items available:

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FBAR, MEMS and NEMS resonator design and applications by Campanella, Humberto. Publication: Boston : Artech House, 2010 . xv, 345 p. : , Includes index. Date: 2010 Availability: No items available:

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