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Results of search for 'su:Semiconductors and su:Etching.'
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Authors
Arce, Gonzalo R.
Chen, Francis F.
Ma, Xu
Series
NRL strategic series
Wiley series in pure...
Topics
Integrated circuits
Microlithography
Photolithography
Plasma engineering
Plasma etching
Resolution (Optics)
Semiconductors
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Your search returned 4 results.
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1.
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Plasma processing and processing science
Publication:
Washington, D.C. : National Academy Press, 1995 . x, 35 p. , Committee chair: Francis F. Chen. | This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Date:
1995
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2.
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Plasma processing and processing science
Publication:
Washington, D.C. : National Academy Press, 1995 . x, 35 p. , Committee chair: Francis F. Chen. | This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Date:
1995
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3.
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Computational lithography
by
Ma, Xu,
Publication:
Oxford : Wiley-Blackwell, 2010 . xv, 226 p. :
Date:
2010
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4.
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Computational lithography
by
Ma, Xu,
Publication:
Oxford : Wiley-Blackwell, 2010 . xv, 226 p. :
Date:
2010
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